Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates: Fid-Bau Portal

Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

Murtagh, M. / Lynch, S. / Kelly, P. V. / Herbert, P. A. F.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

Murtagh, M. / Lynch, S. / Kelly, P. V. / Herbert, P. A. F.

Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

Murtagh, M. / Lynch, S. / Kelly, P. V. / Herbert, P. A. F.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

Beteiligte:

Murtagh, M. (Autor:in) / Lynch, S. (Autor:in) / Kelly, P. V. (Autor:in) / Herbert, P. A. F. (Autor:in) / Hampshire, S. / Buggy, M. / Carr, A. J.

Erschienen in:

Proceedings of the 8th Irish Materials Forum Conference IMF8 University College, Dublin, September, 1992 ; 345

KEY ENGINEERING MATERIALS

Erscheinungsdatum:

01.01.1993

Format / Umfang:

345 pages

ISSN:

1013-9826

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Unbekannt

Klassifikation:

DDC: 620.11

Murtagh, M. / Kelly, P. V. / Herbert, P. A. F. et al. | British Library Online Contents | 1993

Semi-Insulating LEC GaAs substrates with an improved macroscopic and mesoscopic homogeneity

Jurisch, M. / Flade, T. / Hoffmann, B. et al. | British Library Online Contents | 1997

Defects in Semi-Insulating SiC Substrates

Son, N. T. / Magnusson, B. / Zolnai, Z. et al. | British Library Online Contents | 2003

HTCVD Grown Semi-Insulating SiC Substrates

Ellison, A. / Magnusson, B. / Son, N. T. et al. | British Library Online Contents | 2003

Effects of Activation Annealing on Thermally Stimulated Current in Semi-Insulating LEC GaAs substrates

Yoshida, H. / Kiyama, M. / Takebe, T. et al. | British Library Online Contents | 1995

Nach oben