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    Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

    New search for: Murtagh, M.
    New search for: Lynch, S.
    New search for: Kelly, P. V.
    New search for: Herbert, P. A. F.
    New search for: Hampshire, S.
    New search for: Buggy, M.
    New search for: Carr, A. J.

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    Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

    New search for: Murtagh, M.
    New search for: Lynch, S.
    New search for: Kelly, P. V.
    New search for: Herbert, P. A. F.
    New search for: Hampshire, S.
    New search for: Buggy, M.
    New search for: Carr, A. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

    New search for: Murtagh, M.
    New search for: Lynch, S.
    New search for: Kelly, P. V.
    New search for: Herbert, P. A. F.
    New search for: Hampshire, S.
    New search for: Buggy, M.
    New search for: Carr, A. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

    Contributors:

    Murtagh, M. (author) / Lynch, S. (author) / Kelly, P. V. (author) / Herbert, P. A. F. (author) / Hampshire, S. / Buggy, M. / Carr, A. J.

    Published in:

    Proceedings of the 8th Irish Materials Forum Conference IMF8 University College, Dublin, September, 1992 ; 345

    KEY ENGINEERING MATERIALS

    Publication date:

    1993-01-01

    Size:

    345 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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