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Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates
Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates
Photoreflectance investigation of dry-etch-induced damage in semi-insulating GaAs substrates
Murtagh, M. (Autor:in) / Kelly, P. V. (Autor:in) / Herbert, P. A. F. (Autor:in) / O'Connor, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 63 ; 158
01.01.1993
158 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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