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The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition
The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition
The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition
Grannen, K. J. (Autor:in) / Xiong, F. (Autor:in) / Chang, R. P. H. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 2341
01.01.1994
2341 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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