The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition: Fid-Bau Portal

The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition

Grannen, K. J. / Xiong, F. / Chang, R. P. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition

Grannen, K. J. / Xiong, F. / Chang, R. P. H.

The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition

Grannen, K. J. / Xiong, F. / Chang, R. P. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition

Contributors:

Grannen, K. J. (author) / Xiong, F. (author) / Chang, R. P. H. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 9 ; 2341

Publication date:

1994-01-01

Size:

2341 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2005

Crystalline carbon nitride films prepared by microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2006

Effect of silicon impurity on carbon nitride films prepared by microwave plasma chemical vapor deposition

Zhang, Y. P. / Gu, Y. S. | British Library Online Contents | 2001

Plasma enhanced chemical vapor deposition of silicon nitride films from a metal-organic precursor

Hoffman, D. M. / Sri Prakash Rangarajan / Athavale, S. D. et al. | British Library Online Contents | 1994

On the structure and composition of crystalline carbon nitride films synthesized by microwave plasma chemical vapor deposition

Zhang, Y. P. / Gu, Y. S. / Chang, X. R. et al. | British Library Online Contents | 2000