Struture of PtSi/p-Si Nanometer Films Prepared by Sputtering

Jinghua, Y. / Wei, C. / Meicheng, L. | British Library Online Contents | 2003

Nanometer silicon thin films prepared by HF sputtering at low temperature

Zhao, Z. / Cui, R. / Meng, F. et al. | British Library Online Contents | 2004

CNx/TiNy films prepared by ion-beam sputtering

Yu, D. L. / He, J. L. / Liu, S. M. et al. | British Library Online Contents | 2003

Carbon nanometer films prepared by plasma-based ion implantation on single crystalline Si wafer

Liao, J. X. / Liu, W. M. / Xu, T. et al. | British Library Online Contents | 2004

Thin films with nanometer-scale pillar microstructure

Robbie, K. / Shafai, C. / Brett, M. J. | British Library Online Contents | 1999