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AlAs layers with low carbon content grown by ALE using ethyldimethylamine alane as a new aluminum source
AlAs layers with low carbon content grown by ALE using ethyldimethylamine alane as a new aluminum source
AlAs layers with low carbon content grown by ALE using ethyldimethylamine alane as a new aluminum source
Kano, N. (Autor:in) / Hirose, S. (Autor:in) / Hara, K. (Autor:in) / Yoshino, J. (Autor:in)
APPLIED SURFACE SCIENCE ; 82/83 ; 132
01.01.1994
132 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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