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AlAs layers with low carbon content grown by ALE using ethyldimethylamine alane as a new aluminum source
AlAs layers with low carbon content grown by ALE using ethyldimethylamine alane as a new aluminum source
AlAs layers with low carbon content grown by ALE using ethyldimethylamine alane as a new aluminum source
Kano, N. (author) / Hirose, S. (author) / Hara, K. (author) / Yoshino, J. (author)
APPLIED SURFACE SCIENCE ; 82/83 ; 132
1994-01-01
132 pages
Article (Journal)
Unknown
DDC:
621.35
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