Species-specific growth kinetics and film properties in synchrotron radiation-excited Si growth with disilane

Akazawa, H. / Utsumi, Y. / Nagase, M. | British Library Online Contents | 1994

Synchrotron-radiation-excited etching of SiC

Ogura, M. / Terakado, S. / Suzuki, S. et al. | British Library Online Contents | 1994

Effects of oxygen on selective silicon deposition using disilane

O'Neil, P. A. / Oeztuerk, M. C. / Batchelor, A. D. et al. | British Library Online Contents | 1999

Atomic layer epitaxy of germanium

Sugahara, S. / Kitamura, T. / Imai, S. et al. | British Library Online Contents | 1994

Atomic Physics Research with Synchrotron Radiation

Crasemann, Bernd / Wuilleumier, François | Springer Verlag | 1985