Mechanisms of synchrotron radiation-excited etching reactions of semiconductor materials

Ohashi, H. / Yoshida, A. / Tabayashi, K. et al. | British Library Online Contents | 1993

Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

Katoh, T. / Yamaguchi, D. / Satoh, Y. et al. | British Library Online Contents | 2002

Anisotropic etching of silicon nitride at low temperatures by synchrotron radiation

Kitamura, O. / Goto, T. / Terakado, S. et al. | British Library Online Contents | 1994

Reaction products in synchrotron radiation induced dry etching of Ga and Cu

Streller, U. / Krabbe, A. / Schwentner, N. | British Library Online Contents | 1997

Synchrotron radiation stimulated etching SiO2 thin films with a contact cobalt mask

Wang, C. / Urisu, T. | British Library Online Contents | 2005