Laser-assisted dry etching ablation of InP

Dubowski, J. J. / Compaan, A. / Prasad, M. | British Library Online Contents | 1995

CCl~4-assisted CF~4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process

Pfleging, W. / Wesner, D. A. / Kreutz, E. W. | British Library Online Contents | 1996

Laser-assisted etching for micropatterning of InP [2403-30]

Prasad, M. / Dubowski, J. J. / Ruda, H. E. et al. | British Library Conference Proceedings | 1995

Microwave-assisted laser dry etching of silicon [2403-44]

Pfleging, W. / Kreutz, E. W. / Wehner, M. et al. | British Library Conference Proceedings | 1995

Excimer laser etching of diamond-like carbon films: spalling effect

Kononenko, T. V. / Ralchenko, V. G. / Obraztsova, E. D. et al. | British Library Online Contents | 1995