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Laser-assisted etching-like damage of Si

Simakin, A. V. / Shafeev, G. A.

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Laser-assisted etching-like damage of Si

Simakin, A. V. / Shafeev, G. A.

Laser-assisted etching-like damage of Si

Simakin, A. V. / Shafeev, G. A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Laser-assisted etching-like damage of Si

Contributors:

Simakin, A. V. (author) / Shafeev, G. A. (author) / Dieleman, J. / Biermann, U. K. P. / Hess, P.

Published in:

Photon-Assisted Processing of Surfaces and Thin Films ; 422

APPLIED SURFACE SCIENCE ; 86

Publication date:

1995-01-01

Size:

422 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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