Infrared analysis of buried insulator layers formed by ion implantation into silicon

Samitier, J. / Martinez, S. / El Hassani, A. et al. | British Library Online Contents | 1993

Optical effects of buried conductive layers formed by MeV ion implantation

Yu, Y. / Zhou, Z. / Zhao, G. | British Library Online Contents | 1994

Silicon on insulator optical waveguides formed by direct water bonding

Reed, G. T. / Li, J. / Tang, C. K. et al. | British Library Online Contents | 1992

Nitride layers formed by nitrogen implantation into metals

Miyagawa, Y. / Nakao, S. / Baba, K. et al. | British Library Online Contents | 1998

Ellipsometry and microscopy study of nanocrystalline Si:H layers formed by high dose implantation of silicon

Popov, V. P. / Antonova, I. V. / Gutakovsky, A. K. et al. | British Library Online Contents | 2000