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Doping and crystallization of amorphous SiGe films with an excimer (KrF) laser
Doping and crystallization of amorphous SiGe films with an excimer (KrF) laser
Doping and crystallization of amorphous SiGe films with an excimer (KrF) laser
Krishnan, S. (Autor:in) / Chaudhry, M. I. (Autor:in) / Babu, S. V. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 10 ; 1884
01.01.1995
1884 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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