Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. et al. | British Library Online Contents | 2009

Influence of nanocrystalline structure of surface on boron gettering from silicon

Gorelkinskii, Y. V. / Abdullin, K. A. / Mukashev, B. N. et al. | British Library Online Contents | 2006

As-grown iron precipitates and gettering in multicrystalline silicon

Haarahiltunen, A. / Savin, H. / Yli-Koski, M. et al. | British Library Online Contents | 2009

Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, H. / Yli-Koski, M. / Haarahiltunen, A. et al. | British Library Online Contents | 2009

Gettering issues using MeV ion implantation

Rozgonyi, G. A. / Glasko, J. M. / Beaman, K. L. et al. | British Library Online Contents | 2000