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Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Andry, P. S. / Pastel, P. W. / Varhue, W. J.

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Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Andry, P. S. / Pastel, P. W. / Varhue, W. J.

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Andry, P. S. / Pastel, P. W. / Varhue, W. J.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Dokumentinformationen

Ähnliche Titel

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Dokumentinformationen

Titel:

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Beteiligte:

Andry, P. S. (Autor:in) / Pastel, P. W. (Autor:in) / Varhue, W. J. (Autor:in)

Erschienen in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 221-228

Erscheinungsdatum:

01.01.1996

Format / Umfang:

8 pages

ISSN:

0884-2914

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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