Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane: Fid-Bau Portal

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Andry, P. S. / Pastel, P. W. / Varhue, W. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Andry, P. S. / Pastel, P. W. / Varhue, W. J.

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Andry, P. S. / Pastel, P. W. / Varhue, W. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Contributors:

Andry, P. S. (author) / Pastel, P. W. (author) / Varhue, W. J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 221-228

Publication date:

1996-01-01

Size:

8 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Eddy, C. R. / Youchison, D. L. / Sartwell, B. D. et al. | British Library Online Contents | 1992

Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007

Synthesis of free standing carbon nanosheet using electron cyclotron resonance plasma enhanced chemical vapor deposition

Thomas, R. / Rao, G. M. | British Library Online Contents | 2012

Light element distribution in ZnO thin film deposited by electron cyclotron resonance assisted chemical vapor deposition

Sakaguchi, I. | British Library Online Contents | 2003

Diamond-like carbon films prepared by reactive pulsed laser deposition in hydrogen and methane ambient

Budai, J. / Toth, S. / Toth, Z. et al. | British Library Online Contents | 2007