Electron cyclotron resonance plasma-assisted reactive pulsed laser deposition of compound films

Sun, J. / Wu, J. D. / Ling, H. et al. | British Library Online Contents | 2002

Physical properties of a-C:H films prepared by electron cyclotron resonance microwave plasma chemical vapor deposition

Zhou, X. T. / Lee, S. T. / Bello, I. et al. | British Library Online Contents | 2000

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Andry, P. S. / Pastel, P. W. / Varhue, W. J. | British Library Online Contents | 1996

Hydrogen embrittlement of titanium during microwave plasma assisted CVD diamond deposition

Fu, Y. / Yan, B. / Loh, N. L. et al. | British Library Online Contents | 2000

Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Wang, Z. / Ba, D. / Cao, P. et al. | British Library Online Contents | 2007