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Effects of annealing in oxygen and nitrogen atmosphere on F.Z. silicon wafers
Effects of annealing in oxygen and nitrogen atmosphere on F.Z. silicon wafers
Effects of annealing in oxygen and nitrogen atmosphere on F.Z. silicon wafers
Gay, N. (Autor:in) / Floret, F. (Autor:in) / Martinuzzi, S. (Autor:in) / Roux, L. (Autor:in) / Arnould, J. (Autor:in) / Mathieu, G. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 36 ; 125-128
01.01.1996
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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