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Low temperature growth of diamond-like films by cathodic arc plasma deposition
Low temperature growth of diamond-like films by cathodic arc plasma deposition
Low temperature growth of diamond-like films by cathodic arc plasma deposition
Chen, P.-L. (Autor:in) / Tsai, M.-Y. (Autor:in) / Kao, J.-S. (Autor:in)
APPLIED SURFACE SCIENCE ; 92 ; 30-34
01.01.1996
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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