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Low temperature growth of diamond-like films by cathodic arc plasma deposition

Chen, P.-L. / Tsai, M.-Y. / Kao, J.-S.

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Low temperature growth of diamond-like films by cathodic arc plasma deposition

Chen, P.-L. / Tsai, M.-Y. / Kao, J.-S.

Low temperature growth of diamond-like films by cathodic arc plasma deposition

Chen, P.-L. / Tsai, M.-Y. / Kao, J.-S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Low temperature growth of diamond-like films by cathodic arc plasma deposition

Contributors:

Chen, P.-L. (author) / Tsai, M.-Y. (author) / Kao, J.-S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 92 ; 30-34

Publication date:

1996-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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