Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
AES of semi-insulating polycrystalline silicon layers
APPLIED SURFACE SCIENCE ; 99 ; 9-14
01.01.1996
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Optical and structural properties of semi-insulating polycrystalline silicon thin films
British Library Online Contents | 1995
|Europäisches Patentamt | 2024
|Characterisation of semi-insulating polysilicon oxygen doped silicon thin films
British Library Online Contents | 1995
|Annealing and activation of silicon implanted in semi-insulating InP substrates
British Library Online Contents | 2003
|