In situ reflectance monitoring in MOVPE of a multiwafer reactor

Weeks, K. J. / Irvine, S. J. / Stafford, A. et al. | British Library Online Contents | 2001

A model for low pressure chemical vapor deposition in a hot-wall tubular reactor

Houf, W. G. / Grcar, J. F. / Breiland, W. G. | British Library Online Contents | 1993

Justification of the assumption of transport by diffusion in the interwater region of a multiwafer CVD reactor

Loney, N. W. | British Library Online Contents | 1996

Efficient and uniform production of III-nitride films by multiwafer MOVPE

Deschler, M. / Beccard, R. / Wachtendorf, B. et al. | British Library Online Contents | 1997

Multiwafer MOVPE technology for low dimensional Ga-Al-In-N structures

Beccard, R. / Niebuhr, R. / Wachtendorf, B. et al. | British Library Online Contents | 1998