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Study of dielectric properties of laser processed BaTiO~3 thin films on Si(100)with TiN buffer layer
Study of dielectric properties of laser processed BaTiO~3 thin films on Si(100)with TiN buffer layer
Study of dielectric properties of laser processed BaTiO~3 thin films on Si(100)with TiN buffer layer
Shu, N. (Autor:in) / Kumar, A. (Autor:in) / Alam, M. R. (Autor:in) / Chan, H. L. (Autor:in) / You, Q. (Autor:in)
APPLIED SURFACE SCIENCE ; 109/110 ; 366-370
01.01.1997
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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