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Study of dielectric properties of laser processed BaTiO~3 thin films on Si(100)with TiN buffer layer

Shu, N. / Kumar, A. / Alam, M. R. / Chan, H. L. / You, Q.

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Study of dielectric properties of laser processed BaTiO~3 thin films on Si(100)with TiN buffer layer

Shu, N. / Kumar, A. / Alam, M. R. / Chan, H. L. / You, Q.

Study of dielectric properties of laser processed BaTiO~3 thin films on Si(100)with TiN buffer layer

Shu, N. / Kumar, A. / Alam, M. R. / Chan, H. L. / You, Q.

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Check availability in my library

Order at Subito €

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Document information

Title:

Study of dielectric properties of laser processed BaTiO~3 thin films on Si(100)with TiN buffer layer

Contributors:

Shu, N. (author) / Kumar, A. (author) / Alam, M. R. (author) / Chan, H. L. (author) / You, Q. (author)

Published in:

APPLIED SURFACE SCIENCE ; 109/110 ; 366-370

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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