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Electrical reliability and structural inhomogeneity of thermally grown SiO~2
Electrical reliability and structural inhomogeneity of thermally grown SiO~2
Electrical reliability and structural inhomogeneity of thermally grown SiO~2
Toriumi, A. (Autor:in) / Satake, H. (Autor:in) / Yasuda, N. (Autor:in) / Tanamoto, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 117/118 ; 230-236
01.01.1997
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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