Electrical reliability and structural inhomogeneity of thermally grown SiO~2: Fid-Bau Portal

Electrical reliability and structural inhomogeneity of thermally grown SiO~2

Toriumi, A. / Satake, H. / Yasuda, N. / Tanamoto, T.

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Electrical reliability and structural inhomogeneity of thermally grown SiO~2

Toriumi, A. / Satake, H. / Yasuda, N. / Tanamoto, T.

Electrical reliability and structural inhomogeneity of thermally grown SiO~2

Toriumi, A. / Satake, H. / Yasuda, N. / Tanamoto, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Electrical reliability and structural inhomogeneity of thermally grown SiO~2

Contributors:

Toriumi, A. (author) / Satake, H. (author) / Yasuda, N. (author) / Tanamoto, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 117/118 ; 230-236

Publication date:

1997-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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