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Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-Implantation
Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-Implantation
Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-Implantation
Tone, K. (Autor:in) / Weiner, S. R. (Autor:in) / Zhao, J. H. (Autor:in)
MATERIALS SCIENCE FORUM ; 264/268 ; 689-692
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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