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Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-Implantation
Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-Implantation
Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-Implantation
Tone, K. (author) / Weiner, S. R. (author) / Zhao, J. H. (author)
MATERIALS SCIENCE FORUM ; 264/268 ; 689-692
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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