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Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS
Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS
Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS
Wirth, H. (Autor:in) / Anwand, W. (Autor:in) / Brauer, G. (Autor:in) / Voelskow, M. (Autor:in) / Panknin, D. (Autor:in) / Skorupa, W. (Autor:in) / Coleman, P. G. (Autor:in)
MATERIALS SCIENCE FORUM ; 264/268 ; 729-732
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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