Infrared Investigation of Implantation Damage in 6H-SiC

Camassel, J. / Wang, H. / Pernot, J. et al. | British Library Online Contents | 2002

Specific behaviour of CdTe ion implantation damage

Leo, G. / Drigo, A. V. / Traverse, A. | British Library Online Contents | 1993

Damage induced in materials by ion implantation

Mathur, M. S. / McKee, J. S. C. / Liu, M. et al. | British Library Online Contents | 1997

Characterization of neon implantation damage in silicon

Oliviero, E. / Peripolli, S. / Fichtner, P. F. et al. | British Library Online Contents | 2004

Atomistic modeling of dopant implantation and annealing in Si: damage evolution, dopant diffusion and activation

Pelaz, L. / Marqués, L. A. / Aboy, M. et al. | British Library Online Contents | 2005