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Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS
Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS
Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS
Wirth, H. (author) / Anwand, W. (author) / Brauer, G. (author) / Voelskow, M. (author) / Panknin, D. (author) / Skorupa, W. (author) / Coleman, P. G. (author)
MATERIALS SCIENCE FORUM ; 264/268 ; 729-732
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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