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Growth of High Quality AlN Epitaxial Films by Hot-Wall Chemical Vapour Deposition
Growth of High Quality AlN Epitaxial Films by Hot-Wall Chemical Vapour Deposition
Growth of High Quality AlN Epitaxial Films by Hot-Wall Chemical Vapour Deposition
Forsberg, U. (Autor:in) / Birch, J. (Autor:in) / MacMillan, M. F. (Autor:in) / Persson, P. O. A. (Autor:in) / Hultman, L. (Autor:in) / Janzen, E. (Autor:in)
MATERIALS SCIENCE FORUM ; 264/268 ; 1133-1136
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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