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Growth of oriented aluminium nitride films on silicon by chemical vapour deposition
Growth of oriented aluminium nitride films on silicon by chemical vapour deposition
Growth of oriented aluminium nitride films on silicon by chemical vapour deposition
Khan, A. H. (Autor:in) / Odeh, M. F. (Autor:in) / Meese, J. M. (Autor:in) / Charlson, E. M. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 4314
01.01.1994
4314 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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