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Growth of High Quality AlN Epitaxial Films by Hot-Wall Chemical Vapour Deposition
Growth of High Quality AlN Epitaxial Films by Hot-Wall Chemical Vapour Deposition
Growth of High Quality AlN Epitaxial Films by Hot-Wall Chemical Vapour Deposition
Forsberg, U. (author) / Birch, J. (author) / MacMillan, M. F. (author) / Persson, P. O. A. (author) / Hultman, L. (author) / Janzen, E. (author)
MATERIALS SCIENCE FORUM ; 264/268 ; 1133-1136
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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