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Defects in as-grown silicon and their evolution during heat treatments
Defects in as-grown silicon and their evolution during heat treatments
Defects in as-grown silicon and their evolution during heat treatments
Vanhellemont, J. (Autor:in) / Dornberger, E. (Autor:in) / Esfandyari, J. (Autor:in) / Kissinger, G. (Autor:in) / Trauwaert, M.-A. (Autor:in) / Bender, H. (Autor:in) / Graef, D. (Autor:in) / Lambert, U. (Autor:in) / Von Ammon, W. (Autor:in)
MATERIALS SCIENCE FORUM ; 258/263 ; 341-346
01.01.1997
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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