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Crystal-related defects evolution during thin epitaxial layer growth on silicon wafers
Crystal-related defects evolution during thin epitaxial layer growth on silicon wafers
Crystal-related defects evolution during thin epitaxial layer growth on silicon wafers
Borionetti, G. (Autor:in) / Gambaro, D. (Autor:in) / Santi, S. (Autor:in) / Borgini, M. (Autor:in) / Godio, P. (Autor:in) / Pizzini, S. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 218 - 223
01.01.2000
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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