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Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems
Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems
Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems
Polla, D. L. (Autor:in) / Francis, L. F. (Autor:in)
ANNUAL REVIEW OF MATERIALS SCIENCE ; 28 ; 563-598
01.01.1998
36 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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