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    Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems

    New search for: Polla, D. L.
    New search for: Francis, L. F.

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    Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems

    New search for: Polla, D. L.
    New search for: Francis, L. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems

    New search for: Polla, D. L.
    New search for: Francis, L. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems

    Contributors:

    Polla, D. L. (author) / Francis, L. F. (author)

    Published in:

    ANNUAL REVIEW OF MATERIALS SCIENCE ; 28 ; 563-598

    Publication date:

    1998-01-01

    Size:

    36 pages

    ISSN:

    0084-6600

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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