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Electrochemical Behaviour of AlN Films Prepared by Reactive Cathodic Sputtering
Electrochemical Behaviour of AlN Films Prepared by Reactive Cathodic Sputtering
Electrochemical Behaviour of AlN Films Prepared by Reactive Cathodic Sputtering
Vacandio, F. (Autor:in) / Massiani, Y. (Autor:in) / Gravier, P. (Autor:in) / Fedrizzi, L. (Autor:in) / Brida, D. (Autor:in)
MATERIALS SCIENCE FORUM ; 289/292 ; 689-698
01.01.1998
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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