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Electrochemical Behaviour of AlN Films Prepared by Reactive Cathodic Sputtering
Electrochemical Behaviour of AlN Films Prepared by Reactive Cathodic Sputtering
Electrochemical Behaviour of AlN Films Prepared by Reactive Cathodic Sputtering
Vacandio, F. (author) / Massiani, Y. (author) / Gravier, P. (author) / Fedrizzi, L. (author) / Brida, D. (author)
MATERIALS SCIENCE FORUM ; 289/292 ; 689-698
1998-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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