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Evolution and Future Trends of SIMOX Material
Evolution and Future Trends of SIMOX Material
Evolution and Future Trends of SIMOX Material
Krause, S. (Autor:in) / Anc, M. (Autor:in) / Roitman, P. (Autor:in)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 23 ; 25-29
01.01.1998
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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British Library Online Contents | 1998
|Role of SIMOX defects on the structural properties of @b-SiC/SIMOX
British Library Online Contents | 1999
|Strain reduction in the Si overlayer for improved SIMOX material
British Library Online Contents | 1995
|Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
British Library Online Contents | 1993
|Evolution of step-terrace structure at Si-SiO2 interface in SIMOX substrate during annealing
British Library Online Contents | 2002
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