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Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
Criteria for the extraction of SIMOX material parameters from spectroscopic ellipsometry data
Lynch, S. (Autor:in) / Crean, G. M. (Autor:in) / Greef, R. (Autor:in) / Stoemonos, J. (Autor:in)
APPLIED SURFACE SCIENCE ; 63 ; 40
01.01.1993
40 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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