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Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design
Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design
Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design
Rosa, M. A. (Autor:in) / Dimitrijev, S. (Autor:in) / Harrison, H. B. (Autor:in)
JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 9 ; 283-290
01.01.1998
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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