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Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors
A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors
A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors
Lin, T. W. (Autor:in) / Hou, M. T. K. (Autor:in) / Chen, R. S. (Autor:in) / Lee, S.-B. / Kim, Y.-J.
Experimental Mechanics in Nano and Biotechnology ; 1379-1382
KEY ENGINEERING MATERIALS ; 326/328
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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