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Ultraviolet laser-induced formation of thin silicon oxide film from the precursor -chloroethyl silsesquioxane
Ultraviolet laser-induced formation of thin silicon oxide film from the precursor -chloroethyl silsesquioxane
Ultraviolet laser-induced formation of thin silicon oxide film from the precursor -chloroethyl silsesquioxane
Sharma, J. (Autor:in) / Berry, D. H. (Autor:in) / Composto, R. J. (Autor:in) / Dai, H.-L. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 990-994
01.01.1999
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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