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Investigation of 6H-SiC site competition epitaxy the silane-methane-hydrogen gas system
Investigation of 6H-SiC site competition epitaxy the silane-methane-hydrogen gas system
Investigation of 6H-SiC site competition epitaxy the silane-methane-hydrogen gas system
Zelenin, V.V. (Autor:in) / Lebedev, A.A. (Autor:in) / Rastegaeva, M.G. (Autor:in) / Davidov, D.V. (Autor:in) / Chelnokov, V.E. (Autor:in) / Korogodskii, M.L. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 183 - 186
01.01.1999
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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