A platform for research: civil engineering, architecture and urbanism
Investigation of 6H-SiC site competition epitaxy the silane-methane-hydrogen gas system
Investigation of 6H-SiC site competition epitaxy the silane-methane-hydrogen gas system
Investigation of 6H-SiC site competition epitaxy the silane-methane-hydrogen gas system
Zelenin, V.V. (author) / Lebedev, A.A. (author) / Rastegaeva, M.G. (author) / Davidov, D.V. (author) / Chelnokov, V.E. (author) / Korogodskii, M.L. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 183 - 186
1999-01-01
4 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Silane gas-source atomic layer epitaxy
British Library Online Contents | 1992
|Diagnostics and Modeling of Silane and Methane Plasma CVD Processes
British Library Online Contents | 1992
|British Library Online Contents | 1995
|Movable landscapes: site furnishings - Competition
Online Contents | 1994