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Characterization of the oxygen distribution in Czochralski silicon using hydrogen-enhanced thermal donor formation
Characterization of the oxygen distribution in Czochralski silicon using hydrogen-enhanced thermal donor formation
Characterization of the oxygen distribution in Czochralski silicon using hydrogen-enhanced thermal donor formation
Ulyashin, A. G. (Autor:in) / Khorunzhii, I. A. (Autor:in) / Job, R. (Autor:in) / Fahrner, W. R. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 124 - 129
01.01.2000
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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