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Thermal donor formation in direct-plasma hydrogenated n-type Czochralski silicon
Thermal donor formation in direct-plasma hydrogenated n-type Czochralski silicon
Thermal donor formation in direct-plasma hydrogenated n-type Czochralski silicon
Simoen, E. (Autor:in) / Claeys, C. (Autor:in) / Rafi, J. M. (Autor:in) / Ulyashin, A. G. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 134 ; 189-192
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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